Fabrication Facilities and Operational Model at MIT's Microsystems Technology Labs

Fabrication Facilities and Operational Model at MIT's Microsystems Technology Labs

The mission of the Microsystems Technology Laboratories (MTL) is to provide facilities for education and research in micro and nano technology and innovative devices. This paper describes details of its operation, including cost structure, fab management and billing software, interactions with indus...

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Bibliographische Detailangaben
1. Verfasser: Diadiuk, Vicky
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Computer industry
Computer network management
Costs
Educational institutions
Educational technology
Fabrication
Gold
Laboratories
Optoelectronic and photonic sensors
Semiconductor materials
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Beschreibung
Zusammenfassung:The mission of the Microsystems Technology Laboratories (MTL) is to provide facilities for education and research in micro and nano technology and innovative devices. This paper describes details of its operation, including cost structure, fab management and billing software, interactions with industry, government labs and other universities will be described.
ISSN:0749-6877
2375-5350
DOI:10.1109/UGIM.2010.5508856