A systematic device qualification methodology for wafer fab process technology

A systematic device qualification methodology for wafer fab process technology

To transfer a manufacturing process technology from one wafer fab to another fabrication plant is a complex exercise in today's world of semiconductor. The fabrication of a semiconductor component, depending on the product type, requires a series of diffusion, photo-etch and metallization among...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Rajah, Prakash, Teck, Lim Wee
Format: Tagungsbericht
Sprache:eng
Schlagworte:
MOSCAP
Qualifications
Receiving fab
Sending fab
Snakes & Bugs
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Beschreibung
Zusammenfassung:To transfer a manufacturing process technology from one wafer fab to another fabrication plant is a complex exercise in today's world of semiconductor. The fabrication of a semiconductor component, depending on the product type, requires a series of diffusion, photo-etch and metallization among other processes.
ISSN:2159-2047
2159-2055
DOI:10.1109/ICEDSA.2010.5503083