MEMS for sensing high current overload

This paper presents a design and fabrication of advanced MEMS in high power applications. The advanced MEMS devices are used as a circuit breaker to detect high current in a distributed power network. We designed and fabricated an M×N array of low-power MEMS switches to handle high power; they are m...

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Hauptverfasser: Kim, Bruce C, Kasim, Rahim
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Kasim, Rahim
description This paper presents a design and fabrication of advanced MEMS in high power applications. The advanced MEMS devices are used as a circuit breaker to detect high current in a distributed power network. We designed and fabricated an M×N array of low-power MEMS switches to handle high power; they are mass actuated by an external magnetic field.
doi_str_mv 10.1109/IMS3TW.2010.5503015
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fullrecord <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_5503015</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>5503015</ieee_id><sourcerecordid>5503015</sourcerecordid><originalsourceid>FETCH-LOGICAL-i90t-b39de89df00e75c2f25bf058e04261227ae2fad9f59ac86e7cc6083528deaea83</originalsourceid><addsrcrecordid>eNpVj8FKAzEURSMiKHW-oJtZuZv68pJMkqWUqoUOLjrgsqTJSxupM5JUwb-3YDe9m8u5iwOXsSmHGedgH5fdWvTvM4TToBQI4OqKVVYbLlFKrS0X1xeMcMuqUj7gFKkQJL9jD92iW9dxzHWhoaRhV-_Tbl_775xpONbjD-XD6MI9u4nuUKg694T1z4t-_tqs3l6W86dVkywcm62wgYwNEYC08hhRbSMoQyCx5YjaEUYXbFTWedOS9r4FIxSaQI6cERM2_dcmItp85fTp8u_mfE78ARKlQc4</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>MEMS for sensing high current overload</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Kim, Bruce C ; Kasim, Rahim</creator><creatorcontrib>Kim, Bruce C ; Kasim, Rahim</creatorcontrib><description>This paper presents a design and fabrication of advanced MEMS in high power applications. The advanced MEMS devices are used as a circuit breaker to detect high current in a distributed power network. We designed and fabricated an M×N array of low-power MEMS switches to handle high power; they are mass actuated by an external magnetic field.</description><identifier>ISBN: 9781424477920</identifier><identifier>ISBN: 1424477921</identifier><identifier>EISBN: 9781424477913</identifier><identifier>EISBN: 1424477913</identifier><identifier>EISBN: 9781424477937</identifier><identifier>EISBN: 142447793X</identifier><identifier>DOI: 10.1109/IMS3TW.2010.5503015</identifier><language>eng</language><publisher>IEEE</publisher><subject>Bridge circuits ; Circuit breakers ; Coils ; Magnetic fields ; Magnetic switching ; MEMS ; MEMS circuit breaker ; Micromechanical devices ; Microswitches ; Nickel ; Permanent magnets ; power distribution ; Switches</subject><ispartof>2010 IEEE 16th International Mixed-Signals, Sensors and Systems Test Workshop (IMS3TW), 2010, p.1-6</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5503015$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2051,27904,54898</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5503015$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Kim, Bruce C</creatorcontrib><creatorcontrib>Kasim, Rahim</creatorcontrib><title>MEMS for sensing high current overload</title><title>2010 IEEE 16th International Mixed-Signals, Sensors and Systems Test Workshop (IMS3TW)</title><addtitle>IMS3TW</addtitle><description>This paper presents a design and fabrication of advanced MEMS in high power applications. The advanced MEMS devices are used as a circuit breaker to detect high current in a distributed power network. We designed and fabricated an M×N array of low-power MEMS switches to handle high power; they are mass actuated by an external magnetic field.</description><subject>Bridge circuits</subject><subject>Circuit breakers</subject><subject>Coils</subject><subject>Magnetic fields</subject><subject>Magnetic switching</subject><subject>MEMS</subject><subject>MEMS circuit breaker</subject><subject>Micromechanical devices</subject><subject>Microswitches</subject><subject>Nickel</subject><subject>Permanent magnets</subject><subject>power distribution</subject><subject>Switches</subject><isbn>9781424477920</isbn><isbn>1424477921</isbn><isbn>9781424477913</isbn><isbn>1424477913</isbn><isbn>9781424477937</isbn><isbn>142447793X</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2010</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpVj8FKAzEURSMiKHW-oJtZuZv68pJMkqWUqoUOLjrgsqTJSxupM5JUwb-3YDe9m8u5iwOXsSmHGedgH5fdWvTvM4TToBQI4OqKVVYbLlFKrS0X1xeMcMuqUj7gFKkQJL9jD92iW9dxzHWhoaRhV-_Tbl_775xpONbjD-XD6MI9u4nuUKg694T1z4t-_tqs3l6W86dVkywcm62wgYwNEYC08hhRbSMoQyCx5YjaEUYXbFTWedOS9r4FIxSaQI6cERM2_dcmItp85fTp8u_mfE78ARKlQc4</recordid><startdate>201006</startdate><enddate>201006</enddate><creator>Kim, Bruce C</creator><creator>Kasim, Rahim</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>201006</creationdate><title>MEMS for sensing high current overload</title><author>Kim, Bruce C ; Kasim, Rahim</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-b39de89df00e75c2f25bf058e04261227ae2fad9f59ac86e7cc6083528deaea83</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Bridge circuits</topic><topic>Circuit breakers</topic><topic>Coils</topic><topic>Magnetic fields</topic><topic>Magnetic switching</topic><topic>MEMS</topic><topic>MEMS circuit breaker</topic><topic>Micromechanical devices</topic><topic>Microswitches</topic><topic>Nickel</topic><topic>Permanent magnets</topic><topic>power distribution</topic><topic>Switches</topic><toplevel>online_resources</toplevel><creatorcontrib>Kim, Bruce C</creatorcontrib><creatorcontrib>Kasim, Rahim</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Kim, Bruce C</au><au>Kasim, Rahim</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>MEMS for sensing high current overload</atitle><btitle>2010 IEEE 16th International Mixed-Signals, Sensors and Systems Test Workshop (IMS3TW)</btitle><stitle>IMS3TW</stitle><date>2010-06</date><risdate>2010</risdate><spage>1</spage><epage>6</epage><pages>1-6</pages><isbn>9781424477920</isbn><isbn>1424477921</isbn><eisbn>9781424477913</eisbn><eisbn>1424477913</eisbn><eisbn>9781424477937</eisbn><eisbn>142447793X</eisbn><abstract>This paper presents a design and fabrication of advanced MEMS in high power applications. The advanced MEMS devices are used as a circuit breaker to detect high current in a distributed power network. We designed and fabricated an M×N array of low-power MEMS switches to handle high power; they are mass actuated by an external magnetic field.</abstract><pub>IEEE</pub><doi>10.1109/IMS3TW.2010.5503015</doi><tpages>6</tpages></addata></record>
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source IEEE Electronic Library (IEL) Conference Proceedings
subjects Bridge circuits
Circuit breakers
Coils
Magnetic fields
Magnetic switching
MEMS
MEMS circuit breaker
Micromechanical devices
Microswitches
Nickel
Permanent magnets
power distribution
Switches
title MEMS for sensing high current overload
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-23T20%3A25%3A49IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=MEMS%20for%20sensing%20high%20current%20overload&rft.btitle=2010%20IEEE%2016th%20International%20Mixed-Signals,%20Sensors%20and%20Systems%20Test%20Workshop%20(IMS3TW)&rft.au=Kim,%20Bruce%20C&rft.date=2010-06&rft.spage=1&rft.epage=6&rft.pages=1-6&rft.isbn=9781424477920&rft.isbn_list=1424477921&rft_id=info:doi/10.1109/IMS3TW.2010.5503015&rft_dat=%3Cieee_6IE%3E5503015%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&rft.eisbn=9781424477913&rft.eisbn_list=1424477913&rft.eisbn_list=9781424477937&rft.eisbn_list=142447793X&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=5503015&rfr_iscdi=true