MEMS for sensing high current overload
This paper presents a design and fabrication of advanced MEMS in high power applications. The advanced MEMS devices are used as a circuit breaker to detect high current in a distributed power network. We designed and fabricated an M×N array of low-power MEMS switches to handle high power; they are m...
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creator | Kim, Bruce C Kasim, Rahim |
description | This paper presents a design and fabrication of advanced MEMS in high power applications. The advanced MEMS devices are used as a circuit breaker to detect high current in a distributed power network. We designed and fabricated an M×N array of low-power MEMS switches to handle high power; they are mass actuated by an external magnetic field. |
doi_str_mv | 10.1109/IMS3TW.2010.5503015 |
format | Conference Proceeding |
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The advanced MEMS devices are used as a circuit breaker to detect high current in a distributed power network. We designed and fabricated an M×N array of low-power MEMS switches to handle high power; they are mass actuated by an external magnetic field.</description><identifier>ISBN: 9781424477920</identifier><identifier>ISBN: 1424477921</identifier><identifier>EISBN: 9781424477913</identifier><identifier>EISBN: 1424477913</identifier><identifier>EISBN: 9781424477937</identifier><identifier>EISBN: 142447793X</identifier><identifier>DOI: 10.1109/IMS3TW.2010.5503015</identifier><language>eng</language><publisher>IEEE</publisher><subject>Bridge circuits ; Circuit breakers ; Coils ; Magnetic fields ; Magnetic switching ; MEMS ; MEMS circuit breaker ; Micromechanical devices ; Microswitches ; Nickel ; Permanent magnets ; power distribution ; Switches</subject><ispartof>2010 IEEE 16th International Mixed-Signals, Sensors and Systems Test Workshop (IMS3TW), 2010, p.1-6</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5503015$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2051,27904,54898</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5503015$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Kim, Bruce C</creatorcontrib><creatorcontrib>Kasim, Rahim</creatorcontrib><title>MEMS for sensing high current overload</title><title>2010 IEEE 16th International Mixed-Signals, Sensors and Systems Test Workshop (IMS3TW)</title><addtitle>IMS3TW</addtitle><description>This paper presents a design and fabrication of advanced MEMS in high power applications. The advanced MEMS devices are used as a circuit breaker to detect high current in a distributed power network. We designed and fabricated an M×N array of low-power MEMS switches to handle high power; they are mass actuated by an external magnetic field.</description><subject>Bridge circuits</subject><subject>Circuit breakers</subject><subject>Coils</subject><subject>Magnetic fields</subject><subject>Magnetic switching</subject><subject>MEMS</subject><subject>MEMS circuit breaker</subject><subject>Micromechanical devices</subject><subject>Microswitches</subject><subject>Nickel</subject><subject>Permanent magnets</subject><subject>power distribution</subject><subject>Switches</subject><isbn>9781424477920</isbn><isbn>1424477921</isbn><isbn>9781424477913</isbn><isbn>1424477913</isbn><isbn>9781424477937</isbn><isbn>142447793X</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2010</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpVj8FKAzEURSMiKHW-oJtZuZv68pJMkqWUqoUOLjrgsqTJSxupM5JUwb-3YDe9m8u5iwOXsSmHGedgH5fdWvTvM4TToBQI4OqKVVYbLlFKrS0X1xeMcMuqUj7gFKkQJL9jD92iW9dxzHWhoaRhV-_Tbl_775xpONbjD-XD6MI9u4nuUKg694T1z4t-_tqs3l6W86dVkywcm62wgYwNEYC08hhRbSMoQyCx5YjaEUYXbFTWedOS9r4FIxSaQI6cERM2_dcmItp85fTp8u_mfE78ARKlQc4</recordid><startdate>201006</startdate><enddate>201006</enddate><creator>Kim, Bruce C</creator><creator>Kasim, Rahim</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>201006</creationdate><title>MEMS for sensing high current overload</title><author>Kim, Bruce C ; Kasim, Rahim</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-b39de89df00e75c2f25bf058e04261227ae2fad9f59ac86e7cc6083528deaea83</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Bridge circuits</topic><topic>Circuit breakers</topic><topic>Coils</topic><topic>Magnetic fields</topic><topic>Magnetic switching</topic><topic>MEMS</topic><topic>MEMS circuit breaker</topic><topic>Micromechanical devices</topic><topic>Microswitches</topic><topic>Nickel</topic><topic>Permanent magnets</topic><topic>power distribution</topic><topic>Switches</topic><toplevel>online_resources</toplevel><creatorcontrib>Kim, Bruce C</creatorcontrib><creatorcontrib>Kasim, Rahim</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Kim, Bruce C</au><au>Kasim, Rahim</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>MEMS for sensing high current overload</atitle><btitle>2010 IEEE 16th International Mixed-Signals, Sensors and Systems Test Workshop (IMS3TW)</btitle><stitle>IMS3TW</stitle><date>2010-06</date><risdate>2010</risdate><spage>1</spage><epage>6</epage><pages>1-6</pages><isbn>9781424477920</isbn><isbn>1424477921</isbn><eisbn>9781424477913</eisbn><eisbn>1424477913</eisbn><eisbn>9781424477937</eisbn><eisbn>142447793X</eisbn><abstract>This paper presents a design and fabrication of advanced MEMS in high power applications. The advanced MEMS devices are used as a circuit breaker to detect high current in a distributed power network. We designed and fabricated an M×N array of low-power MEMS switches to handle high power; they are mass actuated by an external magnetic field.</abstract><pub>IEEE</pub><doi>10.1109/IMS3TW.2010.5503015</doi><tpages>6</tpages></addata></record> |
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language | eng |
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source | IEEE Electronic Library (IEL) Conference Proceedings |
subjects | Bridge circuits Circuit breakers Coils Magnetic fields Magnetic switching MEMS MEMS circuit breaker Micromechanical devices Microswitches Nickel Permanent magnets power distribution Switches |
title | MEMS for sensing high current overload |
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