MEMS for sensing high current overload

MEMS for sensing high current overload

This paper presents a design and fabrication of advanced MEMS in high power applications. The advanced MEMS devices are used as a circuit breaker to detect high current in a distributed power network. We designed and fabricated an M×N array of low-power MEMS switches to handle high power; they are m...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kim, Bruce C, Kasim, Rahim
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Bridge circuits
Circuit breakers
Coils
Magnetic fields
Magnetic switching
MEMS
MEMS circuit breaker
Micromechanical devices
Microswitches
Nickel
Permanent magnets
power distribution
Switches
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Beschreibung
Zusammenfassung:This paper presents a design and fabrication of advanced MEMS in high power applications. The advanced MEMS devices are used as a circuit breaker to detect high current in a distributed power network. We designed and fabricated an M×N array of low-power MEMS switches to handle high power; they are mass actuated by an external magnetic field.
DOI:10.1109/IMS3TW.2010.5503015