Towards fast femtosecond laser micromachining of glass, effect of deposited energy

We report on the effect of deposited energy for micro-machining of fused silica using femtosecond laser irradiation followed by chemical etching.

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Bibliographische Detailangaben
Hauptverfasser:	Rajesh, Sheeba, Bellouard, Yves
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Chemical lasers Etching Glass Micromachining Nonlinear optics Optical materials Optical microscopy Optical pulses Pulsed laser deposition Ultrafast optics
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Beschreibung
Zusammenfassung:	We report on the effect of deposited energy for micro-machining of fused silica using femtosecond laser irradiation followed by chemical etching.
DOI:	10.1364/CLEO.2010.JTuD18