Geometry Dependent Bird's Beak Formation for Submicron LOCOS Isolation

Bird's beak formation is one of the major problems for LOCOS field isolation. In this paper we demonstrate that the bird's beak length is not a constant, but depends strongly on geometry of the oxidatioin mask for submicron mask dimensions. The bird's beak length can vary up to a fact...

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Bibliographische Detailangaben

Hauptverfasser:	van der Plas, P.A., Wils, N.A.H., de Werdt, R.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Bars Cause effect analysis Etching Geometry Isolation technology Laboratories Oxidation Performance evaluation Programmable logic arrays Tin
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