Geometry Dependent Bird's Beak Formation for Submicron LOCOS Isolation

Bird's beak formation is one of the major problems for LOCOS field isolation. In this paper we demonstrate that the bird's beak length is not a constant, but depends strongly on geometry of the oxidatioin mask for submicron mask dimensions. The bird's beak length can vary up to a fact...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: van der Plas, P.A., Wils, N.A.H., de Werdt, R.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Bird's beak formation is one of the major problems for LOCOS field isolation. In this paper we demonstrate that the bird's beak length is not a constant, but depends strongly on geometry of the oxidatioin mask for submicron mask dimensions. The bird's beak length can vary up to a factor of 4, dependent on mask geometry. Four independent geometry effects are distinguished and their impact on an IC-process is discussed.
DOI:10.1007/978-3-642-52314-4_25