Low thermal budget 6 nm furnace N2O-nitrided gate oxides

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Hauptverfasser:	Paulzen, G.M., Hutten, E.K.H., Meyssen, V.M.H
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Area measurement Capacitors Charge measurement Current measurement Design for quality Electric breakdown Furnaces MOSFETs Nitrogen Oxidation
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creator	Paulzen, G.M. Hutten, E.K.H. Meyssen, V.M.H
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identifier	ISBN: 9782863321829
ispartof	ESSDERC '95: Proceedings of the 25th European Solid State Device Research Conference, 1995, p.239-242
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language	eng
recordid	cdi_ieee_primary_5435957
source	IEEE Electronic Library (IEL) Conference Proceedings
subjects	Area measurement Capacitors Charge measurement Current measurement Design for quality Electric breakdown Furnaces MOSFETs Nitrogen Oxidation
title	Low thermal budget 6 nm furnace N2O-nitrided gate oxides
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