System level realization and analysis of MEMS integrated voltage controlled oscillator

This paper presents the system level realization of a MEMS varactor based voltage controlled oscillator (VCO). The MEMS varactor has been optimally designed with Finite Element analysis in Coventorware platform. The corresponding lumped element version of the varactor has been exported to Saber Schematic platform. Circuit of the VCO has also been implemented in Saber platform, integrating the MEMS varactors in it's tank circuit. Performance of the VCO has been analyzed with the MEMS capacitor of 439 fF and at a frequency of 2.4 GHz. The varactor structure has been fabricated and experimentally characterized for mechanical and electrical performance.