Optimal device structure for Pipe-shaped BiCS Flash memory for ultra high density storage device with excellent performance and reliability

An asymmetric source/drain profile for select gate and metal salicided control gate are successfully realized on Pipe-shaped Bit Cost Scalable (P-BiCS) Flash memory to achieve data storage device with excellent performance and reliability.

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Bibliographische Detailangaben
Hauptverfasser:	Ishiduki, M., Fukuzumi, Y., Katsumata, R., Kito, M., Kido, M., Tanaka, H., Komori, Y., Nagata, Y., Fujiwara, T., Maeda, T., Mikajiri, Y., Oota, S., Honda, M., Iwata, Y., Kirisawa, R., Aochi, H., Nitayama, A.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Character generation FETs Flash memory Information systems Leakage current Manufacturing processes Semiconductor device reliability Shape control Stereolithography Wiring
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Beschreibung
Zusammenfassung:	An asymmetric source/drain profile for select gate and metal salicided control gate are successfully realized on Pipe-shaped Bit Cost Scalable (P-BiCS) Flash memory to achieve data storage device with excellent performance and reliability.
ISSN:	0163-1918 2156-017X
DOI:	10.1109/IEDM.2009.5424261