Fourier Analysis of Particle Motion in a Radio Frequency Plasma Under Pulsed Argon Ion Beam Bombardment
The behavior of a single powder particle with a diameter of 250 ¿m in a radio frequency plasma under pulsed argon ion beam bombardment was investigated. The motion of the powder particle under the action of the ion beam was investigated and Fourier-analyzed. The experimental results are in fair agre...
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Veröffentlicht in: | IEEE transactions on plasma science 2010-04, Vol.38 (4), p.810-813 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The behavior of a single powder particle with a diameter of 250 ¿m in a radio frequency plasma under pulsed argon ion beam bombardment was investigated. The motion of the powder particle under the action of the ion beam was investigated and Fourier-analyzed. The experimental results are in fair agreement with the theoretical considerations. |
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ISSN: | 0093-3813 1939-9375 |
DOI: | 10.1109/TPS.2010.2041461 |