Contact resistance to Al-doped ZnO thin films

Contact resistance to Al-doped ZnO thin films

Polycrystalline ZnO thin films doped with Al are used as transparent conducting oxide (TCO) for solar cells. For such applications, it is necessary to have control on the contact resistance with metals. In this project, we observed the variation of contact resistance of Au/Ti to Al-doped ZnO thin fi...

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Bibliographische Detailangaben
Hauptverfasser: Ishiang Shih, Yi Chen, Shih, J.-L., Myers, H., Champness, C., Han-Jen Yang
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Coatings
Contact resistance
III-V semiconductor materials
Optical reflection
Optical refraction
Optical surface waves
Photovoltaic cells
Solar energy
Transistors
Zinc oxide
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Zusammenfassung:Polycrystalline ZnO thin films doped with Al are used as transparent conducting oxide (TCO) for solar cells. For such applications, it is necessary to have control on the contact resistance with metals. In this project, we observed the variation of contact resistance of Au/Ti to Al-doped ZnO thin films with sheet resistance.
ISSN:0160-8371
DOI:10.1109/PVSC.2009.5411496