Design of a Capacitive LTCC-based Pressure Sensor

Design of a Capacitive LTCC-based Pressure Sensor

A capacitive pressure sensor was realized by using low-temperature co-fired ceramic (LTCC) materials and technology. The paper will present the design considerations of a sensing element, and compares the experimental data to the theoretical design, with the aim to improve the sensor's characte...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Belavic, D., Zarnik, M.S., Marghescu, C., Ionescu, C., Svasta, P., Hrovat, M., Macek, S., Lipuscek, I., Kocjan, S.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Capacitive sensors
Ceramics
Crystalline materials
Dielectric materials
Electronics packaging
Glass
Laminates
Sensor phenomena and characterization
Sheet materials
Thermal conductivity
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A capacitive pressure sensor was realized by using low-temperature co-fired ceramic (LTCC) materials and technology. The paper will present the design considerations of a sensing element, and compares the experimental data to the theoretical design, with the aim to improve the sensor's characteristics. Special points of attention are the linearity, the temperature behaviour, the pressure media and the behaviour of the reference pressure medium.
DOI:10.1109/SIITME.2009.5407406