Ultrathin flexible nanocomposite membranes as miniature pressure sensors

Ultrathin flexible nanocomposite membranes as miniature pressure sensors

Measuring microscopic deflections of membranes caused by small changes in pressure, weight, temperature, or chemical interactions is developing into one of the most versatile sensing approaches. Ultra-thin membranes are emerging as critical elements in various sensing devices, such as acoustic, pres...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Tsukruk, V.V., McConney, M.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Acoustic devices
Acoustic measurements
Acoustic sensors
Biomembranes
Chemical elements
Chemical sensors
Microscopy
Pressure measurement
Temperature sensors
Thermal sensors
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Beschreibung
Zusammenfassung:Measuring microscopic deflections of membranes caused by small changes in pressure, weight, temperature, or chemical interactions is developing into one of the most versatile sensing approaches. Ultra-thin membranes are emerging as critical elements in various sensing devices, such as acoustic, pressure microdevices, chemical and thermal sensors, all discussed in this paper.
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2009.5398186