Fabrication of Passive Wireless Sensor by Pulsed Laser Scribing of Indium Tin Oxide

Fabrication of Passive Wireless Sensor by Pulsed Laser Scribing of Indium Tin Oxide

Passive wireless sensors have been studied by many groups as means of sensing chemical and physical properties in inaccessible locations without the need to include a power source at the sensor location. Indium tin oxide (ITO) thin films are attractive for gas sensing. In this work, we show that las...

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Bibliographische Detailangaben
Hauptverfasser: Balki, O., Elsayed-Ali, H.E.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Acoustic sensors
Biosensors
Chemical lasers
Chemical sensors
Indium tin oxide
Magnetic sensors
Optical device fabrication
Optical pulses
Transistors
Wireless sensor networks
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Beschreibung
Zusammenfassung:Passive wireless sensors have been studied by many groups as means of sensing chemical and physical properties in inaccessible locations without the need to include a power source at the sensor location. Indium tin oxide (ITO) thin films are attractive for gas sensing. In this work, we show that laser scribing can be effectively used to fabricate an antenna structure from ITO thin films. This structure is suitable for a wireless chemical sensor.
ISSN:2157-4952
DOI:10.1109/NTMS.2009.5384661