Development of bolometer-type uncooled THz-QVGA sensor and camera

Bolometer-type uncooled infrared QVGAs (Quarter Video Graphics Arrays, namely, 320times240) were modified to improve their sensitivities at 3 THz. High transmission materials were investigated and it is found that high resistivity silicon with anti-reflection coating of Parylene or Silicon Dioxide is suitable. Using this material, THz lens was fabricated and handy THz camera which operates at TV frame rate was also fabricated. Using the THz camera, NEP (Noise Equivalent Power) of uncooled THz-QVGA sensor was characterized at several wavelengths from 3 to 270 mum. The THz camera showed THz imageries of antigen-antibody reaction without labeling molecules, which indicate that THz detection technology can be promising for detecting proteins.