Femtosecond laser irradiation for functional micro-/nanostructure fabrication

Femtosecond laser is a unique processing tool to make micro-/nanostructures on heat sensitive bio-polymer film & glass substrate, to create 3D structures inside glass, to achieve 20-nm nanostructuring and large-area THz, micro-mold and micro-device patterning.

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Bibliographische Detailangaben
Hauptverfasser:	Minghui Hong, Zaichun Chen, Min Tang, Luping Shi, Tow Chong Chong
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Biomedical optical imaging Computer numerical control fs laser Glass Laser beams Laser theory microfabrication nano-engineering Nonlinear optics Optical device fabrication Optical films Substrates Ultrafast optics
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Beschreibung
Zusammenfassung:	Femtosecond laser is a unique processing tool to make micro-/nanostructures on heat sensitive bio-polymer film & glass substrate, to create 3D structures inside glass, to achieve 20-nm nanostructuring and large-area THz, micro-mold and micro-device patterning.
DOI:	10.1109/CLEOPR.2009.5292198