Design and simulation of a micro gyroscope with decoupled and high linearity structure

A novel micro gyroscope with decoupled and high linearity structure is proposed and simulated. The gyroscope is actuated by electrostatic force and detected by the lateral comb capacitors. The lateral comb capacitors have high linearity, improving the linearity of the gyroscope. The gyroscope achieves complete decoupling between drive and sense modes to minimize the mechanical crosstalk, thanks to the intermediate mass and decoupling beams. Drive and sense amplitudes, mechanical and electrical sensitivities and the quality factor are extracted analytically and results are confirmed using finite element analysis. The FEA using ANSYS shows drive and sense frequency of 4793 Hz and 5150 Hz respectively for only 3% mismatch in resonance frequency. The output signal achieves 20 nm amplitude for 200 deg/s input rotation rate at atmospheric environment, which results in 2.95 aF linear change in the lateral comb capacitance.