A Novel Filter Rating Method Using Less Than 30-nm Gold Nanoparticle and Protective Ligand

This paper describes a novel filter rating method beyond the current 30-nm limit by combining dynamic light scattering and inductively coupled plasma mass spectrometer technique and proposes the use of gold nanoparticle as the standard challenge particle. Furthermore, the effect of protective ligand...

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Veröffentlicht in:IEEE transactions on semiconductor manufacturing 2009-11, Vol.22 (4), p.452-461
Hauptverfasser: Mizuno, T., Namiki, A., Tsuzuki, S.
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Tsuzuki, S.
description This paper describes a novel filter rating method beyond the current 30-nm limit by combining dynamic light scattering and inductively coupled plasma mass spectrometer technique and proposes the use of gold nanoparticle as the standard challenge particle. Furthermore, the effect of protective ligand addition is investigated in order to decrease the adsorbing effect between gold nanoparticle and membrane surface.
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subjects Applied sciences
Biomembranes
Counting circuits
Electronics
Electrons
Exact sciences and technology
Filters
Fluorescence
Gold
Ligands
Light scattering
membranes
metals
Microelectronic fabrication (materials and surfaces technology)
Nanocomposites
Nanomaterials
Nanoparticles
Nanostructure
Optical films
particle measurements
Protection
Protective
Ratings
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Semiconductors
title A Novel Filter Rating Method Using Less Than 30-nm Gold Nanoparticle and Protective Ligand
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