A Novel Filter Rating Method Using Less Than 30-nm Gold Nanoparticle and Protective Ligand

This paper describes a novel filter rating method beyond the current 30-nm limit by combining dynamic light scattering and inductively coupled plasma mass spectrometer technique and proposes the use of gold nanoparticle as the standard challenge particle. Furthermore, the effect of protective ligand...

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Veröffentlicht in:	IEEE transactions on semiconductor manufacturing 2009-11, Vol.22 (4), p.452-461
Hauptverfasser:	Mizuno, T., Namiki, A., Tsuzuki, S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Biomembranes Counting circuits Electronics Electrons Exact sciences and technology Filters Fluorescence Gold Ligands Light scattering membranes metals Microelectronic fabrication (materials and surfaces technology) Nanocomposites Nanomaterials Nanoparticles Nanostructure Optical films particle measurements Protection Protective Ratings Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Semiconductors
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Beschreibung
Zusammenfassung:	This paper describes a novel filter rating method beyond the current 30-nm limit by combining dynamic light scattering and inductively coupled plasma mass spectrometer technique and proposes the use of gold nanoparticle as the standard challenge particle. Furthermore, the effect of protective ligand addition is investigated in order to decrease the adsorbing effect between gold nanoparticle and membrane surface.
ISSN:	0894-6507 1558-2345
DOI:	10.1109/TSM.2009.2031762