Parameters governing the sensor characteristic of capacitive temperature sensors built up in LTCC-technology

The material properties (TCE, dielectric number, etc.) of different LTCC (Low Temperature Co-fired Ceramics) - tape materials were characterized separately and compared to the behavior of combinations of these tapes that were laminated and co-fired. The effects of different values of thermal expansion and change in dielectric number of the combined material stacks have been investigated by finite element analyses and verified using a wireless readout resonant temperature sensor as a demonstration device..