Effects of photoinduced carrier injection on timedependent dielectric breakdown

Effects of photoinduced carrier injection on timedependent dielectric breakdown

Time-dependent dielectric breakdown experiments were performed under broadband UV illumination in order to investigate the effects of increased electron concentration on time to breakdown. Preliminary results show that breakdown can be achieved at shorter time scales and lower fields than in standar...

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Hauptverfasser: Atkin, J.M., Laibowitz, R.B., Heinz, T.F., Lloyd, J.R., Shaw, T.M., Cartier, E.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
breakdown
Dielectric breakdown
Dielectric materials
Electric breakdown
Electrodes
Electrons
Life estimation
low-k
Materials reliability
Metal-insulator structures
Physics
reliability
Testing
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Beschreibung
Zusammenfassung:Time-dependent dielectric breakdown experiments were performed under broadband UV illumination in order to investigate the effects of increased electron concentration on time to breakdown. Preliminary results show that breakdown can be achieved at shorter time scales and lower fields than in standard reliability tests.
ISSN:1541-7026
1938-1891
DOI:10.1109/IRPS.2009.5173365