Unique electrical characterization and in-line monitoring of nano-tipped defects in metal-insulator-metal capacitors

Unique electrical characterization and in-line monitoring of nano-tipped defects in metal-insulator-metal capacitors

The unique characteristics of defective MIM capacitors under nano-ampere current injection and passive voltage contrast have verified the field enhancement and charge accumulation along nanotipped defects. The improved process which reduces the risk of nanowhiskers is confirmed by in-line optical mo...

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Bibliographische Detailangaben
Hauptverfasser: Lieyi Sheng, Snyder, E., Doub, J., Berti, V., Kriner, L., Glines, E.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Dielectrics
Electron emission
Metal-insulator structures
MIM capacitors
Monitoring
Optical saturation
Pattern analysis
Production
Scanning electron microscopy
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Beschreibung
Zusammenfassung:The unique characteristics of defective MIM capacitors under nano-ampere current injection and passive voltage contrast have verified the field enhancement and charge accumulation along nanotipped defects. The improved process which reduces the risk of nanowhiskers is confirmed by in-line optical monitoring in production.
ISSN:1541-7026
1938-1891
DOI:10.1109/IRPS.2009.5173355