PTFE based 60 GHz array for active CMOS integration
In this paper, we consider the design of an integrated 60 GHz array using a hybrid silicon-polymer material system. A PTFE (Teflon) printed square array is proposed and analyzed. A discussion of related microfabrication challenges is also presented, along with some processes to overcome these challe...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | In this paper, we consider the design of an integrated 60 GHz array using a hybrid silicon-polymer material system. A PTFE (Teflon) printed square array is proposed and analyzed. A discussion of related microfabrication challenges is also presented, along with some processes to overcome these challenges. Finally, the topic of silicon- polymer integration is addressed. |
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ISSN: | 1522-3965 1947-1491 |
DOI: | 10.1109/APS.2009.5171669 |