PTFE based 60 GHz array for active CMOS integration

In this paper, we consider the design of an integrated 60 GHz array using a hybrid silicon-polymer material system. A PTFE (Teflon) printed square array is proposed and analyzed. A discussion of related microfabrication challenges is also presented, along with some processes to overcome these challe...

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Hauptverfasser: Moulder, W.F., Volakis, J.L., Emrick, R.M.
Format: Tagungsbericht
Sprache:eng
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Beschreibung
Zusammenfassung:In this paper, we consider the design of an integrated 60 GHz array using a hybrid silicon-polymer material system. A PTFE (Teflon) printed square array is proposed and analyzed. A discussion of related microfabrication challenges is also presented, along with some processes to overcome these challenges. Finally, the topic of silicon- polymer integration is addressed.
ISSN:1522-3965
1947-1491
DOI:10.1109/APS.2009.5171669