Universal modeling of the bulk acoustic wave devices

Highly efficient self-consistent 1D-model is proposed allowing us to describe arbitrary BAW devices, including the tunable ones. Applying that approach one can analyze, in the frame of the same software, a system with arbitrary number and sequence of dielectric and metal layers under arbitrary inter...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Sveshnikov, B.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Attenuation Bulk acoustic wave devices Control systems Dielectrics Electrodes Film bulk acoustic resonators Resonant frequency Software systems Stress Temperature control
Online-Zugang:	Volltext bestellen
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