Universal modeling of the bulk acoustic wave devices

Highly efficient self-consistent 1D-model is proposed allowing us to describe arbitrary BAW devices, including the tunable ones. Applying that approach one can analyze, in the frame of the same software, a system with arbitrary number and sequence of dielectric and metal layers under arbitrary inter...

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Bibliographische Detailangaben
1. Verfasser: Sveshnikov, B.
Format: Tagungsbericht
Sprache:eng
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Beschreibung
Zusammenfassung:Highly efficient self-consistent 1D-model is proposed allowing us to describe arbitrary BAW devices, including the tunable ones. Applying that approach one can analyze, in the frame of the same software, a system with arbitrary number and sequence of dielectric and metal layers under arbitrary inter-electrode connections. It is shown that one can fluently control the resonant frequency of solidly mounted BAW resonator over a fractional frequency range > 1% (being much wider than the system temperature drift).
ISSN:2327-1914
DOI:10.1109/FREQ.2009.5168223