Local Oscillations of On-Die Supply Voltage-A Reliability Issue

On-die measurements of V DD and V SS voltages inside a 90-nm VLSI technology chip are presented. The results show local fluctuations in the V DD and V SS voltages with amplitudes that can reach, in severe cases, more than 10% of V DD . These fluctuations can distort analog signals, cause immediate l...

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Veröffentlicht in:IEEE transactions on device and materials reliability 2009-09, Vol.9 (3), p.476-482
Hauptverfasser: Gurfinkel, M., Livshits, P., Rozen, A., Fefer, Y., Bernstein, J.B., Shapira, Y.
Format: Magazinearticle
Sprache:eng
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Zusammenfassung:On-die measurements of V DD and V SS voltages inside a 90-nm VLSI technology chip are presented. The results show local fluctuations in the V DD and V SS voltages with amplitudes that can reach, in severe cases, more than 10% of V DD . These fluctuations can distort analog signals, cause immediate logic faults, and also aggravate other reliability wear-out mechanisms. Both measurements and simulations predict the aggravation of this phenomenon for future technologies.
ISSN:1530-4388
1558-2574
DOI:10.1109/TDMR.2009.2025955