Design and calibration of a microfabricated 6-axis force-torque sensor for microrobotic applications

This work describes the design of a capacitive multi-axis force-torque sensor for the monitoring of forces in the sub-milli-Newton and sub-micro-Newtonmeter range. This force range makes it a valuable tool for microrobotic applications. The sensor is experimentally investigated and calibrated. This...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Beyeler, F., Muntwyler, S., Nelson, B.J.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Atomic force microscopy Biosensors Calibration Capacitive sensors Capacitors Force measurement Force sensors Magnetic sensors Sensor phenomena and characterization Torque
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