Design and calibration of a microfabricated 6-axis force-torque sensor for microrobotic applications

Design and calibration of a microfabricated 6-axis force-torque sensor for microrobotic applications

This work describes the design of a capacitive multi-axis force-torque sensor for the monitoring of forces in the sub-milli-Newton and sub-micro-Newtonmeter range. This force range makes it a valuable tool for microrobotic applications. The sensor is experimentally investigated and calibrated. This...

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Bibliographische Detailangaben
Hauptverfasser: Beyeler, F., Muntwyler, S., Nelson, B.J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Atomic force microscopy
Biosensors
Calibration
Capacitive sensors
Capacitors
Force measurement
Force sensors
Magnetic sensors
Sensor phenomena and characterization
Torque
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Beschreibung
Zusammenfassung:This work describes the design of a capacitive multi-axis force-torque sensor for the monitoring of forces in the sub-milli-Newton and sub-micro-Newtonmeter range. This force range makes it a valuable tool for microrobotic applications. The sensor is experimentally investigated and calibrated. This is the first microfabricated 6-axis force-torque sensor that has been successfully developed.
ISSN:1050-4729
2577-087X
DOI:10.1109/ROBOT.2009.5152253