GaAs monolithic integrated microwave power sensor in coplanar waveguide technology

We present the fabrication technology, theoretical and experimental results of a novel MMIC compatible broadband power sensor. With a 50 /spl Omega/ coplanar waveguide design, integrated AlGaAs thermoelectric sensor and GaAs bulk micromachined membrane for increased sensitivity this sensor is capabl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Dehe, A., Klingbeil, H., Krozer, V., Fricke, K., Beilenhoff, K., Hartnagel, H.L.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Biomembranes Conductors Coplanar waveguides Electromagnetic heating Gallium arsenide Microwave sensors Microwave technology MMICs Temperature measurement Thermal sensors
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