GaAs monolithic integrated microwave power sensor in coplanar waveguide technology

GaAs monolithic integrated microwave power sensor in coplanar waveguide technology

We present the fabrication technology, theoretical and experimental results of a novel MMIC compatible broadband power sensor. With a 50 /spl Omega/ coplanar waveguide design, integrated AlGaAs thermoelectric sensor and GaAs bulk micromachined membrane for increased sensitivity this sensor is capabl...

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Bibliographische Detailangaben
Hauptverfasser: Dehe, A., Klingbeil, H., Krozer, V., Fricke, K., Beilenhoff, K., Hartnagel, H.L.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Biomembranes
Conductors
Coplanar waveguides
Electromagnetic heating
Gallium arsenide
Microwave sensors
Microwave technology
MMICs
Temperature measurement
Thermal sensors
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Beschreibung
Zusammenfassung:We present the fabrication technology, theoretical and experimental results of a novel MMIC compatible broadband power sensor. With a 50 /spl Omega/ coplanar waveguide design, integrated AlGaAs thermoelectric sensor and GaAs bulk micromachined membrane for increased sensitivity this sensor is capable of detecting RF power with a sensitivity of 1.1 V/W without any waveguide coupling structure.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.1996.508486