Multidomain simulations of silicon sensors with usage of ANSYS and SUGAR software

Multidomain simulations of silicon sensors with usage of ANSYS and SUGAR software

In this paper the multidomain simulations of silicon sensors are presented. Authors on the basis of electro-thermal converter show the idea of operation basic structure made by silicon. All structures were simulated in ANSYS and SUGAR software. They allow checking the behavior of such sensors as ele...

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Bibliographische Detailangaben
Hauptverfasser: Szermer, M., Napieralski, A.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
ANSYS
Computer science
Electro-thermal Converter
Mechanical sensors
MEMS Sensors
Microelectronics
Micromechanical devices
Micromirrors
Resistors
Sensor systems
Silicon
Silicon micromirror
SUGAR
Temperature sensors
Thermal sensors
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Beschreibung
Zusammenfassung:In this paper the multidomain simulations of silicon sensors are presented. Authors on the basis of electro-thermal converter show the idea of operation basic structure made by silicon. All structures were simulated in ANSYS and SUGAR software. They allow checking the behavior of such sensors as electro-thermal converter, silicon micromirror, comb-drive resonator, etc. Simulation results are valuable and necessary to proper design the sensors that could be made in one of the available micromachine technology.