Research on the resonant frequency formula of V-shaped cantilevers

Research on the resonant frequency formula of V-shaped cantilevers

This paper deduces a remarkably precise analytical formula for calculating the fundamental resonant frequency of V-shaped cantilevers using Rayleigh-Ritz method. This analytical formula, which is very convenient for MEMS sensor design, is then validated by ANSYS simulation. This formula raises a new...

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Bibliographische Detailangaben
Hauptverfasser: Kai Yang, Zhigang Li, Yupeng Jing, Dapeng Chen, Tianchun Ye
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Analytical models
Boundary conditions
cantilever
fundamental resonant frequency
Geometry
Kinetic energy
Micromechanical devices
Resonance
Resonant frequency
Shape
Springs
Systems engineering and theory
triangular
V-shaped
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Beschreibung
Zusammenfassung:This paper deduces a remarkably precise analytical formula for calculating the fundamental resonant frequency of V-shaped cantilevers using Rayleigh-Ritz method. This analytical formula, which is very convenient for MEMS sensor design, is then validated by ANSYS simulation. This formula raises a new perspective that, among all the V-shaped cantilevers, the simplest triangular cantilever can lead to maximum resonant frequency and highest sensitivity.
DOI:10.1109/NEMS.2009.5068527