A 3D finite element analysis coupled to the impedance boundary condition for the magnetodynamic problem in radiofrequency plasma devices

In the metallic cooling system (cold crucible) of the radiofrequency (RF) plasma devices, the penetration of flux is limited by the skin effect. So, when analyzing the electromagnetic phenomena that appear in these devices, such metallic parts may be excluded from the region of solution by using the impedance boundary condition (IBC). In this paper the coupling of the IBC to 3D finite element method, when using the magnetic vector potential A and the electric scalar potential V, is described. This model has been applied to an RF plasma device study and validated by comparing the computed results with experimental data.