Multi-bit functional NOR type SONOS memories
We show that nearly 90 electrons can be stored at 30 nm dimensions of memory nodes, sufficient for reproducibility with having multi-bit memory windows, and that a minimum of tunneling oxide thickness is required to assure reliable retention characteristics. This work has achieved ultra-low number o...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | We show that nearly 90 electrons can be stored at 30 nm dimensions of memory nodes, sufficient for reproducibility with having multi-bit memory windows, and that a minimum of tunneling oxide thickness is required to assure reliable retention characteristics. This work has achieved ultra-low number of electron storage while achieving high threshold shifts and demonstrates predictability through self-consistent modeling of programming and erasure characteristics. |
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ISSN: | 1548-3770 2640-6853 |
DOI: | 10.1109/DRC.2008.4800735 |