High-Speed Resonant Microdisk Photodetectors Heterogeneouly Integrated to Si-Wire Waveguide

Etched-mesa micro-disk resonant photo-detector heterogeneously integrated to Si-wire waveguide by oxide-to-oxide bonding has been proposed and analyzed by 3D-FDTD simulation. The 3 mum-, 5 mum- and 8 mum-diameter devices give free-spectral-ranges of 9.4THz, 5.8THz and 3.3THz, respectively. 3 mum- an...

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Bibliographische Detailangaben

Hauptverfasser:	Ter-Hoe Loh, Bhola, B., Seng-Tiong Ho
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Bonding Etching High speed optical techniques Indium phosphide Optical filters Optical interconnections Optical surface waves Optical waveguides Photodetectors Resonance
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