High-Speed Resonant Microdisk Photodetectors Heterogeneouly Integrated to Si-Wire Waveguide

High-Speed Resonant Microdisk Photodetectors Heterogeneouly Integrated to Si-Wire Waveguide

Etched-mesa micro-disk resonant photo-detector heterogeneously integrated to Si-wire waveguide by oxide-to-oxide bonding has been proposed and analyzed by 3D-FDTD simulation. The 3 mum-, 5 mum- and 8 mum-diameter devices give free-spectral-ranges of 9.4THz, 5.8THz and 3.3THz, respectively. 3 mum- an...

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Bibliographische Detailangaben
Hauptverfasser: Ter-Hoe Loh, Bhola, B., Seng-Tiong Ho
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Bonding
Etching
High speed optical techniques
Indium phosphide
Optical filters
Optical interconnections
Optical surface waves
Optical waveguides
Photodetectors
Resonance
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Zusammenfassung:Etched-mesa micro-disk resonant photo-detector heterogeneously integrated to Si-wire waveguide by oxide-to-oxide bonding has been proposed and analyzed by 3D-FDTD simulation. The 3 mum-, 5 mum- and 8 mum-diameter devices give free-spectral-ranges of 9.4THz, 5.8THz and 3.3THz, respectively. 3 mum- and 5 mum-diameter photo-detector potentially can give bandwidths better than 100 GHz.
DOI:10.1109/IPGC.2008.4781364