Studies of large area silicon microstrip sensors
Aiming at future large silicon tracking devices, 4/spl times/8 cm/sup 2/ silicon microstrip sensors were fabricated, and processes related to such sensors were: studied. Fabrication of 4/spl times/8 cm/sup 2/ silicon microstrip sensors from 4 inch wafers had become routine procedure with good yield...
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| container_end_page | 163 vol.1 |
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| creator | Wen-Chin Tsay Jhy-Wong Hong Chang, Y.H. Chen, A. Hou, S.R. Hsu, S.L. Lin, C.H. Lin, W.T. Hsien-Jen Ting Song-Tsang Chiang Chuang, E. Su-Wen Hwang |
| description | Aiming at future large silicon tracking devices, 4/spl times/8 cm/sup 2/ silicon microstrip sensors were fabricated, and processes related to such sensors were: studied. Fabrication of 4/spl times/8 cm/sup 2/ silicon microstrip sensors from 4 inch wafers had become routine procedure with good yield rate. A 4/spl times/64 cm/sup 2/ long ladder, by assembling eight pieces of 4/spl times/8 cm/sup 2/ sensors together, had been tested at CERN SPS area. Test result shows such a detector is feasible.< > |
| doi_str_mv | 10.1109/NSSMIC.1994.474368 |
| format | Conference Proceeding |
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Test result shows such a detector is feasible.< ></description><identifier>ISBN: 9780780325449</identifier><identifier>ISBN: 0780325443</identifier><identifier>DOI: 10.1109/NSSMIC.1994.474368</identifier><language>eng</language><publisher>IEEE</publisher><subject>Assembly ; Detectors ; Leakage current ; Microstrip ; P-n junctions ; Process design ; Resistors ; Silicon ; Strips ; Testing</subject><ispartof>Proceedings of 1994 IEEE Nuclear Science Symposium - NSS'94, 1994, Vol.1, p.160-163 vol.1</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/474368$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2052,4036,4037,27902,54895</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/474368$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Wen-Chin Tsay</creatorcontrib><creatorcontrib>Jhy-Wong Hong</creatorcontrib><creatorcontrib>Chang, Y.H.</creatorcontrib><creatorcontrib>Chen, A.</creatorcontrib><creatorcontrib>Hou, S.R.</creatorcontrib><creatorcontrib>Hsu, S.L.</creatorcontrib><creatorcontrib>Lin, C.H.</creatorcontrib><creatorcontrib>Lin, W.T.</creatorcontrib><creatorcontrib>Hsien-Jen Ting</creatorcontrib><creatorcontrib>Song-Tsang Chiang</creatorcontrib><creatorcontrib>Chuang, E.</creatorcontrib><creatorcontrib>Su-Wen Hwang</creatorcontrib><title>Studies of large area silicon microstrip sensors</title><title>Proceedings of 1994 IEEE Nuclear Science Symposium - NSS'94</title><addtitle>NSSMIC</addtitle><description>Aiming at future large silicon tracking devices, 4/spl times/8 cm/sup 2/ silicon microstrip sensors were fabricated, and processes related to such sensors were: studied. 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Test result shows such a detector is feasible.< ></description><subject>Assembly</subject><subject>Detectors</subject><subject>Leakage current</subject><subject>Microstrip</subject><subject>P-n junctions</subject><subject>Process design</subject><subject>Resistors</subject><subject>Silicon</subject><subject>Strips</subject><subject>Testing</subject><isbn>9780780325449</isbn><isbn>0780325443</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1994</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotj81qwzAQhAWl0JL6BXLSC9jVRrv26lhMfwJpe3B7Doq8LipOHCT30LevIR0Gvjl9MEqtwVQAxt2_dd3rtq3AOaywQVvzlSpcw2ap3RCiu1FFzt9mCRIh1LfKdPNPHyXradCjT1-ifRKvcxxjmE76GEOa8pziWWc55SnlO3U9-DFL8c-V-nx6_Ghfyt3787Z92JURDM6lc4ENBiawzkPfswQC6WmZm0bY9mxYiNjyIQQWGQJgTbWXg20IBrArtb54o4jszykeffrdX27ZP7boQyA</recordid><startdate>1994</startdate><enddate>1994</enddate><creator>Wen-Chin Tsay</creator><creator>Jhy-Wong Hong</creator><creator>Chang, Y.H.</creator><creator>Chen, A.</creator><creator>Hou, S.R.</creator><creator>Hsu, S.L.</creator><creator>Lin, C.H.</creator><creator>Lin, W.T.</creator><creator>Hsien-Jen Ting</creator><creator>Song-Tsang Chiang</creator><creator>Chuang, E.</creator><creator>Su-Wen Hwang</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>1994</creationdate><title>Studies of large area silicon microstrip sensors</title><author>Wen-Chin Tsay ; Jhy-Wong Hong ; Chang, Y.H. ; Chen, A. ; Hou, S.R. ; Hsu, S.L. ; Lin, C.H. ; Lin, W.T. ; Hsien-Jen Ting ; Song-Tsang Chiang ; Chuang, E. ; Su-Wen Hwang</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i104t-99c804c85139a1dd8ec51ed51dd27e83d808e55838bcc8eefc14656aeb3751f13</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1994</creationdate><topic>Assembly</topic><topic>Detectors</topic><topic>Leakage current</topic><topic>Microstrip</topic><topic>P-n junctions</topic><topic>Process design</topic><topic>Resistors</topic><topic>Silicon</topic><topic>Strips</topic><topic>Testing</topic><toplevel>online_resources</toplevel><creatorcontrib>Wen-Chin Tsay</creatorcontrib><creatorcontrib>Jhy-Wong Hong</creatorcontrib><creatorcontrib>Chang, Y.H.</creatorcontrib><creatorcontrib>Chen, A.</creatorcontrib><creatorcontrib>Hou, S.R.</creatorcontrib><creatorcontrib>Hsu, S.L.</creatorcontrib><creatorcontrib>Lin, C.H.</creatorcontrib><creatorcontrib>Lin, W.T.</creatorcontrib><creatorcontrib>Hsien-Jen Ting</creatorcontrib><creatorcontrib>Song-Tsang Chiang</creatorcontrib><creatorcontrib>Chuang, E.</creatorcontrib><creatorcontrib>Su-Wen Hwang</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Wen-Chin Tsay</au><au>Jhy-Wong Hong</au><au>Chang, Y.H.</au><au>Chen, A.</au><au>Hou, S.R.</au><au>Hsu, S.L.</au><au>Lin, C.H.</au><au>Lin, W.T.</au><au>Hsien-Jen Ting</au><au>Song-Tsang Chiang</au><au>Chuang, E.</au><au>Su-Wen Hwang</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Studies of large area silicon microstrip sensors</atitle><btitle>Proceedings of 1994 IEEE Nuclear Science Symposium - NSS'94</btitle><stitle>NSSMIC</stitle><date>1994</date><risdate>1994</risdate><volume>1</volume><spage>160</spage><epage>163 vol.1</epage><pages>160-163 vol.1</pages><isbn>9780780325449</isbn><isbn>0780325443</isbn><abstract>Aiming at future large silicon tracking devices, 4/spl times/8 cm/sup 2/ silicon microstrip sensors were fabricated, and processes related to such sensors were: studied. Fabrication of 4/spl times/8 cm/sup 2/ silicon microstrip sensors from 4 inch wafers had become routine procedure with good yield rate. A 4/spl times/64 cm/sup 2/ long ladder, by assembling eight pieces of 4/spl times/8 cm/sup 2/ sensors together, had been tested at CERN SPS area. Test result shows such a detector is feasible.< ></abstract><pub>IEEE</pub><doi>10.1109/NSSMIC.1994.474368</doi></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISBN: 9780780325449 |
| ispartof | Proceedings of 1994 IEEE Nuclear Science Symposium - NSS'94, 1994, Vol.1, p.160-163 vol.1 |
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| language | eng |
| recordid | cdi_ieee_primary_474368 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Assembly Detectors Leakage current Microstrip P-n junctions Process design Resistors Silicon Strips Testing |
| title | Studies of large area silicon microstrip sensors |
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