Development of novel plasma devices based on the plasma lens configuration

Here is a brief review some new results of development novel generation cylindrical plasma devices based on an idea of magnetic insulation electrons and an electrostatic plasma lens configuration. The axial-symmetric plasma lens is a well-explored device for manipulating high current, heavy ion beam...

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Hauptverfasser: Goncharov, O.A., Evsyukov, A.N., Litovko, I.V.
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:Here is a brief review some new results of development novel generation cylindrical plasma devices based on an idea of magnetic insulation electrons and an electrostatic plasma lens configuration. The axial-symmetric plasma lens is a well-explored device for manipulating high current, heavy ion beams, that has been used to preference to focus wide-aperture, heavy metal ion beams such as produced by vacuum arc ion sources (like MEVVA ion sources). The plasma lens configuration of crossed electric and magnetic fields provides an attractive and suitable method for establishing a stable plasma discharge at low pressure. Use of plasma lens configuration in this way was elaborated, investigated and developed some cost efficiency, low maintenance plasma devices based on this approach, for ion treatment and deposition of exotic coatings with given functional properties. These devices make using of permanent magnets and possess considerable flexibility with respect to spatial configuration. We describe the new results of theoretical calculations and experimental investigations physical mechanisms, determining optimal operation conditions cylindrical plasma devices based on plasma lens configuration.
ISSN:1093-2941
DOI:10.1109/DEIV.2008.4676836