Monolithic integrated-optic position/displacement sensor using waveguide gratings and QW-DFB laser

A monolithic fully-integrated interferometer position/displacement sensor is proposed. The device is implemented with waveguide grating components, a GRIN SCH SQW DFB laser and photodiodes. A prototype device of 6.5/spl times/2.0 mm/sup 2/ chip size and 0.4/spl times/0.4 mm/sup 2/ sensing beam apert...

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Veröffentlicht in:	IEEE photonics technology letters 1995-10, Vol.7 (10), p.1195-1197
Hauptverfasser:	Suhara, T., Taniguchi, T., Uemukai, M., Nishihara, H., Hirata, T., Iio, S., Suehiro, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Bragg gratings Diode lasers Integrated optics Lenses Monolithic integrated circuits Optical waveguide components Optical waveguides Photodiodes Waveguide components Waveguide lasers
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