Monolithic integrated-optic position/displacement sensor using waveguide gratings and QW-DFB laser

Monolithic integrated-optic position/displacement sensor using waveguide gratings and QW-DFB laser

A monolithic fully-integrated interferometer position/displacement sensor is proposed. The device is implemented with waveguide grating components, a GRIN SCH SQW DFB laser and photodiodes. A prototype device of 6.5/spl times/2.0 mm/sup 2/ chip size and 0.4/spl times/0.4 mm/sup 2/ sensing beam apert...

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Veröffentlicht in:IEEE photonics technology letters 1995-10, Vol.7 (10), p.1195-1197
Hauptverfasser: Suhara, T., Taniguchi, T., Uemukai, M., Nishihara, H., Hirata, T., Iio, S., Suehiro, M.
Format: Artikel
Sprache:eng
Schlagworte:
Bragg gratings
Diode lasers
Integrated optics
Lenses
Monolithic integrated circuits
Optical waveguide components
Optical waveguides
Photodiodes
Waveguide components
Waveguide lasers
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Zusammenfassung:A monolithic fully-integrated interferometer position/displacement sensor is proposed. The device is implemented with waveguide grating components, a GRIN SCH SQW DFB laser and photodiodes. A prototype device of 6.5/spl times/2.0 mm/sup 2/ chip size and 0.4/spl times/0.4 mm/sup 2/ sensing beam aperture is fabricated, and the sensor operation of submicron resolution is demonstrated.< >
ISSN:1041-1135
1941-0174
DOI:10.1109/68.466588