Frequency sources and filters applications using high overtone bulk acoustic resonators exhibiting high Q.f product

Frequency sources and filters applications using high overtone bulk acoustic resonators exhibiting high Q.f product

Bulk acoustic waves excited in thin piezoelectric films have revealed their capabilities for addressing the problem of high frequency RF filters and frequency sources (above 1 GHz). In this paper, we propose an alternative to thin film deposition consisting in single crystal wafers bonded on substra...

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Bibliographische Detailangaben
Hauptverfasser: Gachon, D., Masson, J., Courjon, E., Gruson, Y., Ballandras, S.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Couplings
Electrodes
Harmonic analysis
Resonant frequency
Resonator filters
Substrates
Transducers
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Beschreibung
Zusammenfassung:Bulk acoustic waves excited in thin piezoelectric films have revealed their capabilities for addressing the problem of high frequency RF filters and frequency sources (above 1 GHz). In this paper, we propose an alternative to thin film deposition consisting in single crystal wafers bonded on substrate (high quality) and thinned down, allowing for plate thickness close to 30 mum. This has been achieved on 3 inches wafers and allows for an accurate selection of the wave characteristics.
ISSN:2327-1914
DOI:10.1109/FREQ.2008.4623106