Automatic Tool Changer for SPMs

Automatic Tool Changer for SPMs

Our research encompasses improvements in SPM instrumentation needed for rapid automated change of nano- working tools like cantilever chips or grippers in the immediate region of SEM or FIB field of view. The major challenges are utmost precision working-tool positioning, repeatable clamping of the...

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Hauptverfasser: Neitzel, M., Schmucker, U., Zubtsov, M.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Accuracy
Assembly
Microscopy
Nanoparticles
Nanoscale devices
Probes
Scanning electron microscopy
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creator Neitzel, M.
Schmucker, U.
Zubtsov, M.
description Our research encompasses improvements in SPM instrumentation needed for rapid automated change of nano- working tools like cantilever chips or grippers in the immediate region of SEM or FIB field of view. The major challenges are utmost precision working-tool positioning, repeatable clamping of the tool and placing the working-part in the same point after tool's change, and devising a design which will not incapacitate SEM or FIB for work. The communication presents an entirely new approach with the promise to meet these demands.
doi_str_mv 10.1109/NANO.2008.253
format Conference Proceeding
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source IEEE Electronic Library (IEL) Conference Proceedings
subjects Accuracy
Assembly
Microscopy
Nanoparticles
Nanoscale devices
Probes
Scanning electron microscopy
title Automatic Tool Changer for SPMs
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