Automatic Tool Changer for SPMs

Automatic Tool Changer for SPMs

Our research encompasses improvements in SPM instrumentation needed for rapid automated change of nano- working tools like cantilever chips or grippers in the immediate region of SEM or FIB field of view. The major challenges are utmost precision working-tool positioning, repeatable clamping of the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Neitzel, M., Schmucker, U., Zubtsov, M.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Accuracy
Assembly
Microscopy
Nanoparticles
Nanoscale devices
Probes
Scanning electron microscopy
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Beschreibung
Zusammenfassung:Our research encompasses improvements in SPM instrumentation needed for rapid automated change of nano- working tools like cantilever chips or grippers in the immediate region of SEM or FIB field of view. The major challenges are utmost precision working-tool positioning, repeatable clamping of the tool and placing the working-part in the same point after tool's change, and devising a design which will not incapacitate SEM or FIB for work. The communication presents an entirely new approach with the promise to meet these demands.
ISSN:1944-9399
1944-9380
DOI:10.1109/NANO.2008.253