Spatial scanning-probe array system for silicon-on-insulator integrated circuits

Spatial scanning-probe array system for silicon-on-insulator integrated circuits

A spatial scanning-probe array system for silicon-on-insulator (SOI) integrated circuit is proposed in this paper. The operating fundamentals, specifications, and simulations are presented in this paper. The proposed system is designed to scan the circuit in order to examine the surface and detect d...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Wen Ren Yang
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Arrays
Discrete wavelet transforms
Electrooptical waveguides
Integrated circuits
Optical filters
Optical reflection
Optical scattering
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Beschreibung
Zusammenfassung:A spatial scanning-probe array system for silicon-on-insulator (SOI) integrated circuit is proposed in this paper. The operating fundamentals, specifications, and simulations are presented in this paper. The proposed system is designed to scan the circuit in order to examine the surface and detect die cracks. The post signal processing by using discrete wavelet transform (DWT) for scattered optical signal is also proposed and simulated.
ISSN:1548-3746
1558-3899
DOI:10.1109/MWSCAS.2008.4616948