A micromirror scanner with vertical combs tilted by assembly process

A micromirror scanner with vertical combs tilted by assembly process

We have developed a simple assembly technology to realize the tilted vertical combs for electrostatic micromirror scanners. The in-plane vertical comb electrodes are easily transformed into out-of-plane tilted comb by asymmetrical pushing down the levers of the spring that is attached to the micro m...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Min-Ho Jun, Sungsik Yun, Man Geun Kim, Sung-Kil Lee, Jong-Hyun Lee
Format: Tagungsbericht
Sprache:eng
Schlagworte:
alignment pillar
Assembly
Fabrication
mirror scanner
Mirrors
Optical device fabrication
Optical imaging
Resonant frequency
Silicon
tilting
vertical combs
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Beschreibung
Zusammenfassung:We have developed a simple assembly technology to realize the tilted vertical combs for electrostatic micromirror scanners. The in-plane vertical comb electrodes are easily transformed into out-of-plane tilted comb by asymmetrical pushing down the levers of the spring that is attached to the micro mirror. The fabricated mirror scanner showed the optical scan angle of up to 1.3deg at 60 V and the resonant frequency of 3.15 kHz.
ISSN:2160-5033
DOI:10.1109/OMEMS.2008.4607871