Impact of high optical power on optical MEMS

Impact of high optical power on optical MEMS

A number of applications require optical MEMS devices to handle high optical power. We present theoretical and experimental results for SUMMiTtrade fabricated mirrors and other structures illustrating performance limitations and several mitigation strategies.

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Bibliographische Detailangaben
Hauptverfasser: Spahn, O.B., Phinney, L.M., Wong, C.C., Cowan, W.D., Adams, D.P., Grossetete, G.D.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Coatings
deformation
MEMS mirrors
Mirrors
Optical device fabrication
Optical imaging
Optical interferometry
optical power handling
Optical reflection
Power lasers
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Beschreibung
Zusammenfassung:A number of applications require optical MEMS devices to handle high optical power. We present theoretical and experimental results for SUMMiTtrade fabricated mirrors and other structures illustrating performance limitations and several mitigation strategies.
ISSN:2160-5033
DOI:10.1109/OMEMS.2008.4607832