Effect of grounding arrangement on PZT thin film capacitor

Effect of grounding arrangement on PZT thin film capacitor

This paper reports on a new investigation carried out on the grounding arrangement of monolithic microwave integrated circuit (MMIC) thin film capacitors to improve their high frequency behavior. Via holes have been etched on the PZT to create the ground contact. The measurement shows an improvement...

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Bibliographische Detailangaben
Hauptverfasser: Sulaiman, S., Lazim, N.F.M., Bakar, R.A., Awang, Z., Dollah, A.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Capacitors
Electrodes
Grounding
Microwave circuits
Microwave integrated circuits
Microwave theory and techniques
MMIC capacitors
MMICs
thin film
via hole
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Beschreibung
Zusammenfassung:This paper reports on a new investigation carried out on the grounding arrangement of monolithic microwave integrated circuit (MMIC) thin film capacitors to improve their high frequency behavior. Via holes have been etched on the PZT to create the ground contact. The measurement shows an improvement in the capacitor response compared to direct contact to the exposed Pt area at the film edge.
DOI:10.1109/APACE.2007.4603975