Quantum well nanomechanical actuators with atomic vertical resolution

Quantum well nanomechanical actuators with atomic vertical resolution

A novel continuously tunable vertical actuator with sub-nanometer resolution is presented. It consists of a heterostructure cantilever which has collapsed over a 125 nm thick nanogap. Its operating principle relies on the temperature dependence of the adhesion energy between two InGaAs surface quant...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Makowski, J.D., Talghader, J.J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Conferences
microactuator
microcantilever
Nanotechnology
semiconductor heterostructure
surface forces
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Beschreibung
Zusammenfassung:A novel continuously tunable vertical actuator with sub-nanometer resolution is presented. It consists of a heterostructure cantilever which has collapsed over a 125 nm thick nanogap. Its operating principle relies on the temperature dependence of the adhesion energy between two InGaAs surface quantum well surfaces. Deflections from -17 nm to 5 nm with a precision better than three atomic layers have been measured.
ISSN:1944-9399
1944-9380
DOI:10.1109/NANO.2007.4601158