Optofluidic assembly of microdisk lasers on a silicon chip

Optofluidic assembly of microdisk lasers on a silicon chip

A room-temperature optofluidic assembly process to integrate III-V microdisk lasers on a silicon chip is demonstrated. The assembly is accomplished using lateral-field optoelectronic tweezers, which achieves an unoptimized placement accuracy of approximately plusmn 0.25 mum.

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Bibliographische Detailangaben
Hauptverfasser: Ohta, A.T., Ming-Chun Tien, Kyoungsik Yu, Neale, S.L., Wu, M.C.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Annealing
Assembly
Electrodes
Optical pumping
Pump lasers
Semiconductor lasers
Silicon
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Beschreibung
Zusammenfassung:A room-temperature optofluidic assembly process to integrate III-V microdisk lasers on a silicon chip is demonstrated. The assembly is accomplished using lateral-field optoelectronic tweezers, which achieves an unoptimized placement accuracy of approximately plusmn 0.25 mum.
ISSN:1099-4742
2376-8614
DOI:10.1109/LEOSST.2008.4590562